MEMS power generator with transverse mode thin film PZT
نویسندگان
چکیده
A thin film lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), MEMS power generating device is developed. It is designed to resonate at specific frequencies from an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device i t 2 f 1 d r ©
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